1 Maintenance

 

1.1 Maintenance and maintenance of mechanical vacuum pump:

 

(1) the pump and its surrounding environment should always be kept clean.

 

(2) During the operation of the pump, the amount of oil in the tank should not be lower than the center of the oil standard.

 

(3) different kinds and brands of vacuum pump oil can not be mixed.

 

(4) the temperature rise of the pump in use can not exceed 70℃.

 

(5) the new pump in the use of 100 h or so should be changed 1 ~ 2 times of oil, to be replaced in the oil is no longer found to contain black metal powder, can be extended oil change period. Determine the oil change period according to the specification and the actual use situation.

 

(6) The new pump and the repaired pump should be run for 4 ~ 6 hours to check whether the pump meets the requirements of use.

 

(7) after using the pump for a long time (2 ~ 3 years), the limit vacuum degree decreases, should be a maintenance. At the same time, systems, pipes, valves and motors should be cleaned and overhauled.

 

(8) Pump in use, due to system damage and other special accidents, or air intake suddenly exposed to the atmosphere, should stop the pump as soon as possible, and cut off the vacuum pipe connected with the system (close the low vacuum valve or vacuum clamp), to prevent oil injection, pollution of the workplace.

 

(9) Do not disassemble all parts of the pump unless absolutely necessary.

 

(10) when the pump is not in use, the rubber plug (cap) is applied to plug the air inlet, so as to avoid stolen goods and hard things falling into the pump.

 

(11) often pay attention to the development trend of vacuum technology, as early as possible to introduce new technology, new materials (such as new pump oil, etc.), to improve the performance of the original system.

 

Above point, can press specific situation, set corresponding operating rules, strict implementation.

 

1.2 Routine maintenance of the whole equipment:

 

(1) Operators should be familiar with all kinds of instruments, pumps and parts of equipment. Read and understand instructions.

 

(2) The water pressure of cooling water should be maintained between 0.1 ~ 0.2Mpa, and the outlet water temperature should be less than or equal to 45℃.

 

(3) the pressure of compressed air is between 0.4 ~ 0.5Mpa.

 

(4) Before starting each furnace, check the cylinder capacity of the protective gas to avoid insufficient gas charge and replace the cylinder.

 

(5) If there is any abnormal situation after starting the machine, it should be immediately ruled out or shut down to find the reason.

 

(6) Check the water return of each part regularly, and ensure that each part has sufficient cooling water when working.

 

(7) When the equipment stops using, the gas in the furnace should be evacuated and not used for a long time. Protective gas should be filled and the circulating water in the water-cooling sleeve of the equipment should be discharged.

 

(8) mechanical pumps and Roots pumps should be regularly replaced with oil, and the oil cup of Roots pumps should always be filled with oil. Be sure to drain the waste oil when changing the oil.

 

(9) diffusion pump oil change, if there is internal oxidation, to the diffusion pump internal oxidation layer clean, and then put on the new oil.

 

(10) The purity of the filled protective gas should not be less than 99.99%.

 

(11) The equipment is not allowed to use flammable, explosive and corrosive gases as a protective atmosphere.

 

(12) the surface of the equipment and the surface of the instrument should be kept clean, and the rag with water and non-vacuum oil is not allowed to wipe the inner wall of the furnace body.

 

(13) the oil and water separator on the pneumatic triplet of the pneumatic system should often discharge water, and the vacuum diffusion pump oil should be injected into the oil mist.

 

(14) The overall voltage of the equipment shall be guaranteed within the range of 350 ~ 420 V. Three phases have to be balanced.

 

(15) regulation, electric contact pressure gauge, thermocouple and other places should often be coated with diffusion pump oil, so that a layer of oil film is formed between it and the seat to prevent air leakage. The above parts and flange joints are not allowed to use vacuum mud sealing for a long time.

 

(16) Check the bolts of all parts regularly. If loose, tighten them in time.

 

(17) When the equipment is working, pay attention to the display of each instrument and the sound of each pump, so as to find out the abnormality and the problem in time.

 

(18) The operating environment of the equipment shall be below 85% relative humidity and 10 ~ 40℃ temperature. When dismantling and repairing the equipment, each part shall not be struck by heavy hammer, and the sealing surface and sealing groove shall not be scratched.

 

(19) When the equipment is working, the operator shall not leave the post for a long time